Фазовая диаграмма системы S-Si

К оглавлению: Другие диаграммы (Others phase diargams)


As-Si (Arsenic-Silicon) R.W. Olesinski and G.J. Abbaschian The Si-As system exhibits the following stable phases at a pressure of ~40 bar: (1) the liquid, L; (2) the terminal solid solution of As in Si, (Si), which is retrograde with a maximum solubility of approximately 3.5 at.% As at ~1200 C; (3) the solid solution of Si in As, (As), with negligible solubility of Si (normal sublimation temperature of As is 614 C); (4) the intermediate phase SiAs, which melts congruently at 1113 C; and (5) the intermediate phase SiAs2, which transforms peritectically at 977 C to SiAs and a liquid of 79 at.% As. The assessed phase diagram is based primarily on review of the work of [41Kle], [71San], [74Uga], and [81Uga]. The solid solubility of As in Si crystals can be extended to as much as 20 at.% As by ion implantation and subsequent laser annealing [77Gei]. 41Kle: W. Klemm and P. Pirscher, Z. Anorg. Allg. Chem., 247, 211-220 (1941) in German. 71San: J.S. Sandhu and J.L. Reuter, IBM J. Res. Develop., 15, 464-471 (1971). 74Uga: Ya.A. Ugay, S.N. Miroshnichenko, and E.G. Goncharov, Izv. Akad. Nauk SSSR, Neorg. Mater., 10, 1774-1777 (1974) in Russian. 77Gei: H.D. Geller, G. Gotz, K.D. Klinge, and N. Triem, Phys. Status Solidi (a) , 41, K171-K173 (1977). 81Uga: Ya.A. Ugay, E.G. Goncharov, N.F. Glaydshev, A.E. Popov, and N.Yu. Inozemtseva, Fiz. Khim. Prots. Polyprovod. Poverkh, 138-144 (1981) in Russian. Published in Bull. Alloy Phase Diagrams, 6(3), Jun 1985. Complete evaluation contains 4 figures, 2 tables, and 34 references. 1